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Characterizing Amorphous Silicon and Polysilicon

FilmTek™ Advantages

  • Simultaneous measurement of a-Si thickness, oxide thickness, and a-Si crystallinity.
  • Advanced process control achieved with FilmTek's™ high resolution measurement of optical constants and thickness.

 

Amorphous Silicon/Oxide/Silicon

 

                                                 

 

 

Study of Amorphous Silicon Crystallization Due to Heat Treatment

 

 

Polysilicon/Oxide/Silicon

 

                                       

  

 

 

 

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