Home | Customer Support | Download Center | Literature | Search

 

Home
Company
Metrology Products
Software Products
Applications
Contact Us

 

 

 

Characterizing Silicon on Sapphire

FilmTek™ Advantages

  • Simultaneous measurement of silicon thickness and surface roughness.
  • Measure the profile of silicon implant damage using FilmTek's™ advanced modeling algorithms.
  • Superior film characterization enables accurate and repeatable process monitoring.

 

Heteroepitaxial Silicon on Sapphire

 

                             

 

 

Profile of Implant Damage: Silicon Epi on Sapphire

 

                               

 

 

 

 

 

Copyright© Scientific Computing International 1993-2008. All rights reserved.

Top