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Measuring Silicon-on-Insulator (SOI) Films

FilmTek™ Advantages

  • Simultaneous determination of silicon and buried oxide thickness.
  • Fast, accurate, and repeatable measurement of thin and thick SOI films.
 

Very Thick SOI (285 microns)

 

 

Thick SOI (100 microns)

 

Thin SOI (50 nm)

 

 

 

 

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