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Characterizing Oxide Films for Waveguide Applications

FilmTek™ Advantages

  • FilmTek™ 4000 measures thickness and index of refraction independently with SCI's patented Differential Power Spectral Density (DPSD) technology.
  • Accurate and simultaneous determination of film thickness and index of refraction as a function of wavelength [ n(l) ]  (both TE and TM components of index).
  • Measure optical properties from 190nm-1700nm.
  • FilmTek™ 4000 has the highest resolution and repeatability in the industry, with a thickness resolution of 2Å and index resolution of 2x10-5.

 

6.5mm Ge-SiO2/15mm SiO2/Silicon Substrate

 

 

 

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