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Characterizing Oxide Films for Waveguide Applications
FilmTek™ Advantages
- FilmTek™ 4000 measures thickness and index of refraction independently
with SCI's patented Differential Power Spectral Density (DPSD) technology.
- Accurate and simultaneous determination of film thickness and index
of refraction as a function of wavelength [ n(l)
] (both TE and TM components of index).
- Measure optical properties from 190nm-1700nm.
- FilmTek™ 4000 has the highest resolution and repeatability in the
industry, with a thickness resolution of 2Ĺ and index resolution of
2x10-5.
6.5µm Ge-SiO2/15µm
SiO2/Silicon Substrate
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