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Characterizing Phase Change Materials: GeSbTe (Germanium-Antimony-Tellurium or GST)

FilmTek™ Advantages

  • Simultaneous measurement of GeSbTe thickness, index, and band gap energy.
  • Fully characterize the highly absorbing GeSbTe film by measuring multiple-angle reflection and ellipsometric data from the deep UV through the near IR.
  • Superior film characterization enables accurate and repeatable process monitoring.

 

GeSbTe (Amorphous) / Oxide / Silicon

                        

 

GeSbTe (Crystalline) / Oxide / Silicon

 

                               

 

 

 

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