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FilmTek™ 4000 Repeatability
FilmTek™ Advantages
- FilmTek™ 4000 measures thickness and index of refraction independently
with SCI's patented Differential Power Spectral Density (DPSD) technology.
- Accurate and simultaneous determination of film thickness and index
of refraction as a function of wavelength [ n(l)
] (both TE and TM components of index).
- Best index and thickness repeatability in the industry.
FilmTek™ 4000A Index and Thickness Repeatability: 160 Wafer Load/Unload
Cycles
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