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Worksheet |
Design |
Materials
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Run Sheet
FilmMonitorTM is a thin film software tool used to translate
multi-layered thin film designs into optical monitor run sheets. FilmMonitorTM
combines ease of use with powerful and versatile features. In
particular, FilmMonitorTM:
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FilmMonitorTM quickly creates
easy to understand optical monitor run sheets for the optical coating
technician/operator. |
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Designs may be imported from Film WizardTM
or input directly into FilmMonitorTM. |
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Up to 100 monitor chips may be employed
in a design. Chip material and angle of incidence may be separately
specified for each individual chip. |
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FilmMonitorTM supports monitoring
of transmittance, reflectance, and ellipsometric parameters (tan(y),
cos(D), y,
D) at multiple wavelengths. |
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FilmMonitorTM supports output
in absolute or relative units. In relative mode, gain and offset
may be adjusted at the start of each layer. |
FilmMonitorTM allows the user to import Film WizardTM
projects or input designs directly into FilmMonitorTM.
Once the design is loaded, FilmMonitorTM automatically displays
the index profile, the expected monitor chart, and fills the optical monitor
worksheet. Each design may employ up to 100 optical monitor chips.
Chips may be of different materials and have varying angles of incidence.
One of the most attractive FilmMonitorTM features is the flexibility
it gives the user interactively adding chips, changing film thicknesses,
materials, gains, offsets, tooling factors, and wavelengths. FilmMonitorTM
allows the user to monitor transmittance (Tr, Ts ,
and Tp,), reflectance (Rr, Rs, and Rp),
and ellipsometric parameters (tan(y), cos(D),
y, D) at multiple
wavelengths. The user can also select the output to be in absolute
or relative units. In relative mode, gain and offset may be adjusted
at the start of each layer. The user can also specify various tooling
factors to account for unequal deposition rates and indices of refraction
between the optical monitor chip and the work.
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FilmMonitorTM Worksheet Window
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FilmMonitorTM allows the user to construct designs with up
to 500 discrete layers. The thicknesses may be physical, optical or
mixed. Designs are automatically converted from optical to physical.
Layers may be input either individually {1L 2H 1L 2H}, as stacks of repeated
layers enclosed in parenthesis { (1L 2H)2 }, or as stacks of repeated groups
within groups { ((1H 1L)5 2L)3 4H}. Layers may also be specified as
quarter waves at different design wavelengths {1Lq450 1Hq650}. As
many as 26 different materials may be specified per design. A spreadsheet
style material list allows loading and editing the material properties.
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FilmMonitorTM Design Window
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FilmMonitorTM incorporates a large library of NK files for
the more widely used materials which the user can edit and expand.
Material types can also be defined by one of the following equation/models:
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Sellmeier |
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Cauchy |
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Cauchy Exponential |
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Drude |
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Lorentz Oscillator |
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Drude+Lorentz Oscillator |
FilmMonitorTM gives the user a great deal of flexibility in
generating optical monitor run sheets. User may customize a run sheet
by inserting text and pictures, formatting fonts, and selecting the fields
that will appear in the run sheet. Also, run sheets may be saved as
templates for subsequent run sheets. The user has the option to quickly
generate graphs of expected output versus deposition time or thickness of
the stack/chip. FilmMonitorTM graphs are fully customizable.
A few of the options include line style and color, font size and color,
linear/log scale, and subscripts and superscripts in legends and graph titles.
The graphs may also be copied as metafiles or bitmaps to the clipboard.
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Customizable Monitor Chart
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Customizable Run Sheet
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Microsoft Windows 2000 or XP operating system.
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