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Software > FilmEllipse™

Ease of Use  |  Instrument Parameter Settings  |  Layer Settings  |  Database

FilmEllipse^TM is an easy to use production oriented software tool for the analysis and acquisition of ellipsometric data.  FilmEllipse^TM allows the user to find solutions to a wide range of applications not typically covered by the software bundled with commercially available ellipsometers.  In particular, FilmEllipse^TM:

	Simultaneously solves for complex indices (n+ik) and thicknesses of multi-layer film structures.
	Allows the user to enter ellipsometric and spectrophotometric data collected at multiple wavelengths and angles of incidence.
	May be operated in either an engineering or manufacturing mode.  The manufacturing mode requires little or no experience in personal computers or thin film optics.
	Gives unique self-consistent layer thickness solutions.  Most commercially available three wavelength ellipsometers treat each wavelength independently, which results in three different thickness solutions (one for each wavelength).  FilmEllipseTM uses the fact there can physically only be one thickness value and calculates a thickness which consistently fits all three wavelengths.
	Global Solution/Optimization methods are used to obtain the best solutions, thereby avoiding local minima and minimizing sensitivity to measurements errors.
	Maximum and minimum bounds may be placed on any unknown thickness or index of refraction.
	Gives the user flexibility in customizing FilmEllipseTM for entry and storage of user defined fields.
	Automatically saves and groups experimental data, instrument parameter settings, layer structures, and comments in a user defined database for later analysis.  This feature is important in performing statistical process control and instrument calibration.

Ease of Use

FilmEllipse^TM is designed to be operated in either an engineering or manufacturing mode.

The manufacturing mode is specifically designed such that little or no experience in personal computers, thin film optics, or ellipsometric techniques is required. I n this mode the user interacts with a single window (shown below) to open pre-defined recipes which automatically load all instrument parameters and layer settings.  The user need only enter the experimental data and fill in the user defined fields.

FilmEllipseTM Main Window

In the engineering mode, the engineer specifies the recipe settings.  Each recipe contains the layer and material settings, instrument/ellipsometer parameter settings and the required user defined fields such as lot number, wafer number, etc.  These recipes may be protected with an optional password and saved for later use.

Instrument Parameter Settings

FilmEllipse^TM allows the user to enter ellipsometric data (tan(y), cos(D), y, D) by itself or in conjunction with spectrophotometric data (i.e., transmittance and/or reflectance).  This is particularly valuable to users who also employ spectrophotometers (e.g., Nanospecs) for film thickness measurements.  Measured data may be collected at multiple wavelengths and incident angles.

Design Window

Layer Settings

As many as three layers may can be specified in the film stack.  Films may be dielectric, semiconductors, or metallic (absorbing).  The optical properties of the various films and substrates are stored as tables of complex refractive index (n+ik) versus wavelength. FilmEllipse^TM comes with a large database of optical constants (nk) which may be edited.  Up to three different wavelengths can be used in a single recipe with multiple angles of incidence.  Maximum and minimum bounds may be placed on any unknown thickness or index of refraction.

Design Window

Database

One of the most attractive features of FilmEllipse^TM is the flexibility it gives the user in customizing FilmEllipse^TM for entry and storage of user defined fields.  The engineer can specify up to 100 fields.  The allowed field types include ComboBoxes, Yes/No, Text, Integer, Long, Single, Double, and Dates.  In this way, process dependent data can be stored along with the solutions in tab delimited files.  The data files FilmEllipse^TM generates can be readily imported into Microsoft Excel or Microsoft Access.

FilmEllipseTM Custom Database Window

Minimum System Requirements

Microsoft Windows 2000 or XP operating system.

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