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Measuring Color Coordinates: Colored Resists

FilmTek™ Advantages

  • FilmTek™ simultaneously measures thickness, optical constants, and CIE color coordinates.
  • Superior film characterization enables accurate and repeatable process monitoring.

 

Measuring Colored Resists on Silicon > Blue Resist

 

 

Measuring Colored Resists on Silicon > Red Resist

 

Measuring Colored Resists on Silicon > Green Resist

 

Measuring Colored Resists on Silicon > CIE Color Coordinates

 

 

 

 

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