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Applications

FilmTek™ metrology systems can measure a broad array of single and multi-layer films including metallic, semiconductor, amorphous, crystalline, and dielectric materials on virtually any substrate.  FilmTek™ can simultaneously determine:

  • Multiple layer thicknesses (from <1Å to 250 microns)
  • Indices of refraction [ n(l) ]  (both TE and TM components of index)
  • Extinction (absorption) coefficients [ k(l) ]
  • Birefringence (l)
  • Energy band gap [ Eg ]
  • Surface roughness and damage
  • Porosity, composition, and crystallinity (EMA model)

  • Film properties versus temperature
  • Wafer curvature and film stress

 

Optoelectronics Application Reports

 

Semiconductor Application Reports

 

   

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