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FilmTek™ spectrophotometry-based metrology systems come in a variety of configurations, and depending on the model can measure reflection, transmission, multiple angle reflection, spectroscopic ellipsometry, and generalized ellipsometry data. FilmTek™ spectroscopic ellipsometers are based on a rotating compensator design and combine spectroscopic ellipsometry with multiple angle reflectometry to provide peak performance from very-thin to very-thick films. |
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